Nanofabrication Demonstration Laboratory

Nanofabrication Demonstration Laboratory (NDL) is a class 10,000 cleanroom at room 3114. With this cleanroom facility, the NFF(CWB) can organise process training and support outreach activities. The processes supported by the NDL include photolithography, wet etching, oxidation, physical vapor deposition (PVD) and some basic metrology. Also, this lab houses the polishers for wafer polishing and the wafer dicing saw.

Address:
Dr Tai-chin Lo Nanosystem Fabrication Facility
Rm 3114, 3/F (Lift no. 19),
The Hong Kong University of Science & Technology
Clear Water Bay
Kowloon, Hong Kong