Equipment and Processes in NFF (CWB)

NFF (CWB) provides different types of equipment organized into various modules, including the Mask Making Module, Photolithography Module, Wet Etching and CMP Module, Thermal Diffusion and Implantation Module, Dry Etching and Sputtering Module, and Metrology Module. Each module performs a set of specific processes.

• Equipment List
• Process Specifications
• Equipment Operation Manuals
• Baseline