Wet Station
E2: General Purpose
| Cleanliness Levels | SEMI-CLEAN |
| Cautions | No metals Don't pour BOE, HF, Freckle Etch or 777 into the quartz bath. Use a PP, HDPE or Teflon container instead Don't take the cassette away Don't leave any unnecessary things on the top of the wetstation. |
| Solution | - |
| Temperature | - |
| Etch Rate | - |
| Aim | Allowing users to mix own chemical |
| Application | 1. Recycle of B3 LTO 2. Post-CMP Clean 3. Sulfuric Clean for quartz |