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Nanosystem Fabrication Facility (CWB)
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Equipment & Process
Equipment and process in NFF (CWB)
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Equipment and process in NFF (CWB)
Equipment List
Mask Making Module
Photolithography Module
Wet Etching and CMP Module
Thermal Diffusion and Ion Implantation Module
Dry Etching and Sputtering Module
Metrology
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Equipment Operation Manual
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Process Flows
Why process flows ?
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Standard format
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Sample process flow
Photoresist Thickness Data